Preparation of <i>a</i>-axis oriented Y1Ba2Cu3O7−δ films by laser metalorganic chemical vapor deposition

Abstract

Superconducting Y1Ba2Cu3O 7−δ (YBCO) thin films were prepared on MgO(100) substrates by metalorganic chemical vapor deposition. The films were partly irradiated by ArF excimer laser during deposition. We found that the irradiated parts were strongly a-axis oriented normal to the surface of the substrate for YBCO films prepared at 650–700 °C, whereas the x-ray diffraction pattern of the unirradiated parts consisted of the peaks of the (110), (00l), and (h00) planes. The surface morphology of the laser irradiated part of the films was very smooth, whereas that of the unirradiated parts was relatively rough. The zero-resistance temperature of the unirradiated and the irradiated parts of YBCO films prepared at 650 °C were 45 and 72 K, respectively.