Concepedia

Nuclear reaction analysis of shallow boron implants in silicon

P. J. Scanlon, G. Farrell, M. C. Ridgway, Řeža Valizadeh

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 17 citations · 3 references

DOI

Concepts

References

3

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

, , +16

The optimization of a rutherford backscattering geometry for enhanced depth resolution

J. S. Williams · Nuclear Instruments and Methods · 1975 · 96 citations

, , +8

Nuclear reaction analysis of boron and oxygen in silicon

E. Ligeon, André Bontemps · Journal of Radioanalytical and Nuclear Chemistry · 1972 · 77 citations

, , +10