RF Magnetic Properties of FeCoB/Al$_{2}$O$_{3}$/FeCoB Structure With Varied Al$_{2}$O$_{3}$ Thickness

Abstract

Physical vapor deposition prepared FeCoB(100 nm)/Al <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">$_{2}$</tex></formula> O <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">$_{3}$</tex></formula> /FeCoB(100 nm) sandwich structures with different Al <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$_{2}$</tex> </formula> O <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$_{3}$</tex> </formula> thickness (2 to 15 nm) were studied. The magnetization curves showed that the in-plane coercive field and saturation field along the easy axis decreased with increase in Al <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$_{2}$</tex> </formula> O <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$_{3}$</tex> </formula> thickness. The saturation magnetization field 4 <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">$\pi$</tex></formula> <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$M_{ s}$</tex></formula> for all samples is above 1.6 T. The coercive field remained below 0.5 Oe for Al <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">$_{2}$</tex></formula> O <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">$_{3}$</tex></formula> thickness greater than 6 nm, approximately when the antiferromagnetic coupling switched to ferromagnetic coupling. The existence of optical modes in ferromagnetic resonance (FMR) curves confirmed antiferromagnetic coupling in samples with Al <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">$_{2}$</tex></formula> O <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">$_{3}$</tex></formula> thickness below 6 nm. At 8.5 GHz, the sandwich structure with a 3 nm Al <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$_{2}$</tex> </formula> O <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$_{3}$</tex> </formula> layer displayed a narrow linewidth of only 29 Oe, indicating lower magnetic loss in the sandwich structure compared to the single layer FeCoB with a thickness of 200 nm that exhibited a linewidth of 50 Oe. Also, all sandwich structures demonstrated real relative permeability of above 600 up to 1.5 GHz. The FeCoB(100 nm)/Al <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$_{2}$</tex> </formula> O <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$_{3}$</tex> </formula> (3 nm)/FeCoB(100 nm) structure with low coercive field, high magnetization, and low FMR linewidth presents great potential in RF magnetic application.