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Size dependent enhancement of helium ion irradiation tolerance in sputtered Cu/V nanolaminates

Materials ScienceMaterials EngineeringIon ImplantationEngineeringElectron-beam LithographyPhysicsNanomaterialsNanotechnologyApplied PhysicsSputtered Cu/v NanolaminatesIon BeamVacuum DeviceChemical Vapor DepositionSize Dependent Enhancement