Influence of the Mn concentration on the electromechanical response <i>d</i>₃₃ of Mn‐doped ZnO films

Abstract

Abstract The influence of Mn concentration on the electromechanical response d 33 of Mn‐doped ZnO films has been investigated. It is found that d 33 decreases slightly with the increase of Mn concentration until 4.8 at%, and then increases rapidly with Mn concentration increasing further. The maximum d 33 value of ∼86 pC/N is obtained in Zn 0.913 Mn 0.087 O films. When the Mn concentration exceeds 8.7 at%, d 33 turns to decrease. We suggest that Mn valence and ionic size in Mn‐doped ZnO films play important roles in the electromechanical response. The improved piezoelectric properties could make Mn‐doped ZnO a promising candidate for piezoelectric devices. (© 2010 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)