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Effect of the neutral ligand (L) on the characteristics of hexafluoroacetylacetonate (hfac)Cu(I)-L precursor and on the copper deposition process

Materials ScienceInorganic ChemistryChemical EngineeringEngineeringNeutral LigandFluorous Synthesis-L PrecursorChemistryCopper Deposition ProcessMetal-organic PolyhedronInorganic Synthesis