Publication | Closed Access
Formation and characterization of low resistivity sub-100nm copper films deposited by electroless on SAM
38
Citations
15
References
2009
Year
Materials ScienceElectrical EngineeringElectromigration TechniqueEngineeringSpecific ResistanceNanoelectronicsSurface ScienceApplied PhysicsThin FilmsElectrical PropertyElectrochemistry
| Year | Citations | |
|---|---|---|
Page 1
Page 1