Publication | Closed Access
Surface chemistry of non-stoichiometric TiNx films grown on (100)Si substrate by DC reactive magnetron sputtering
22
Citations
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References
2002
Year
Materials ScienceMaterials EngineeringSi SubstrateSurface CharacterizationEngineeringSurface ChemistryNanotechnologyNanoelectronicsSurface ScienceApplied PhysicsNon-stoichiometric Tinx FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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