Residual stress gradient analysis by the GIXRD method on CVD tantalum thin films - Concepedia

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Residual stress gradient analysis by the GIXRD method on CVD tantalum thin films

39

Citations

4

References

2005

Year

J. Peng, Vincent Ji, W. Seiler, A. Tomescu, A. Levesque, A. Bouteville

Surface and Coatings Technology

Materials ScienceEngineeringGixrd MethodApplied PhysicsStressstrain AnalysisResidual StressThin FilmsMechanics Of Materials

References

	Year	Citations

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