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Property variations of direct-current reactive magnetron sputtered copper oxide thin films deposited at different oxygen partial pressures

Materials ScienceMaterials EngineeringMagnetismCopper Oxide MaterialsDirect-current Reactive MagnetronEngineeringMaterial AnalysisOxide ElectronicsSurface ScienceApplied PhysicsProperty VariationsMagnetic Thin FilmsThin FilmsThin Film Processing