Improved microscratch hardness of ion-plated carbon film by nitrogen inclusion evaluated by atomic force microscope

Abstract

Nitrogen-containing carbon films where deposited by reactive ion plating under a pure nitrogen ambient. Knoop hardness, microindentation hardness, and microscratch hardness of these films were evaluated. Indentation hardness, such as Knoop hardness and microindentation hardness, is influenced by surface roughness and substrate hardness, so the effect of nitrogen inclusion on the hardness cannot be clearly evaluated. In contrast, an atomic force microscope can clearly evaluate the effect of nitrogen inclusion on scratched wear depth.