Publication | Closed Access
Silicon oxide and nitride films deposited by an r.f. glow-discharge
45
Citations
10
References
1968
Year
Materials ScienceElectrical EngineeringEngineeringOxide ElectronicsGlow DischargeSurface ScienceApplied PhysicsSilicon OxideVacuum DeviceGas Discharge PlasmaSilicon On Insulator
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