Effect of radio-frequency noise suppression on the coplanar transmission line using soft magnetic thin films

Abstract

We demonstrated the radio-frequency (rf) noise suppressor using soft magnetic films on a coplanar transmission line from 0.1 to 20 GHz. The coplanar transmission line is composed of magnetic film/polyimide/Cu transmission line/seed layer (Cu/Ti)/glass substrate with the dimension of 50 μm width of the signal line and 3 μm thickness (characteristic impedance: 50 Ω). The magnetic films (CoPdAlO, CoZrO, and CoNbZr) as a noise suppressor are prepared by rf sputtering. The saturation magnetization of each magnetic film is about 10 kG. The magnetic anisotropy field and the ferromagnetic resonance frequency are 230, 89, and 6 Oe and 4.2, 2.5, and 0.7 GHz, respectively. The power loss of the coplanar line with magnetic films is significantly larger than without magnetic and nonmagnetic films due to ferromagnetic resonance losses.