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MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes

Materials ScienceMaterials EngineeringEngineeringElectronic MaterialsApplied PhysicsSolid-state ChemistryVapor Pressure CharacteristicsChemistryChemical Vapor DepositionFunctional MaterialsRecent Advances