Concepedia

Publication | Closed Access

Alternative approach in 3D MEMS-IC integration using fluidic self-assembly techniques

DOI

26

Citations

32

References

2009

Year

Y.A. Chapuis, A. Debray, Laurent Jalabert, Hiroyuki Fujita
Journal of Micromechanics and Microengineering

Abstract

International audience

References

YearCitations

Page 1