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Thermal stability and oxidation resistance of Ti–B–N, Ti–Cr–B–N, Ti–Si–B–N and Ti–Al–Si–B–N films

Materials EngineeringMaterials ScienceEngineeringOxidation ResistanceTi–al–si–b–n FilmsApplied PhysicsSemiconductor MaterialThin Film Process TechnologyThin FilmsThermal StabilityThin Film Processing