Incorporation of nitrogen in sputtered carbon films - Concepedia

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Incorporation of nitrogen in sputtered carbon films

25

Citations

14

References

1996

Year

N. Axén, Gianluigi A. Botton, Hongbo Lou, R.E. Somekh, Ian M. Hutchings

Surface and Coatings Technology

Materials ScienceCarbonizationEngineeringCarbon-based MaterialSurface ScienceApplied PhysicsSputtered Carbon FilmsThin FilmsCarbon-based FilmsChemical Vapor Deposition

References

	Year	Citations

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