Publication | Closed Access
Generation of ammonia plasma using a helical antenna and nitridation of GaAs surface
16
Citations
8
References
2003
Year
Electrical EngineeringEngineeringHelical AntennaNonthermal PlasmaApplied PhysicsGaas SurfaceGas Discharge PlasmaAmmonia PlasmaPlasma ProcessingPlasma Application
| Year | Citations | |
|---|---|---|
Page 1
Page 1