Concepedia

Gas-phase diagnosis and high-rate growth of stable a-Si:H

Toshiyuki Takagi, Rio Hayashi, G. Ganguly, Michio Kondo, Akihisa Matsuda

Thin Solid Films · 1999 · 47 citations · 6 references

DOI

Concepts

References

6

Structural interpretation of the vibrational spectra of<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>a</mml:mi></mml:math>-Si: H alloys

G. Lucovsky, R. J. Nemanich, J. C. Knights · Physical review. B, Condensed matter · 1979 · 810 citations

, , +16

Plasma spectroscopy—Glow discharge deposition of hydrogenated amorphous silicon

Akihisa Matsuda, Kazunobu Tanaka · Thin Solid Films · 1982 · 198 citations

, , +12

Mass spectrometry of a silane glow discharge during plasma deposition of a-Si: H films

G. Turban, Y. Catherine, B. Grolleau · Thin Solid Films · 1980 · 144 citations

, , +12

The Influence of the Si-H<sub>2</sub> Bond on the Light-Induced Effect in a-Si Films and a-Si Solar Cells

Noboru Nakamura, Tsuyoshi Takahama, Masao Isomura et al. · Japanese Journal of Applied Physics · 1989 · 106 citations

, , +17

Ionic species in a silane plasma

Ivan Haller · Applied Physics Letters · 1980 · 76 citations

, , +15