Characteristics of high-frequency and direct-current argon discharges at low pressures: a comparative analysis

Abstract

A theoretical analysis of the characteristics of high-frequency and direct-current argon discharges at low pressures is carried out and a comparison of the basic properties of these discharges is presented. This analysis uses recent calculations of electron energy distributions and collision rate coefficients in argon under the action of uniform AC and DC electric fields together with a steady-state discharge model expressing the balance between collisional ionisation of the gas and the loss of electrons to the wall. The electric field strength, E, required for the steady-state operation of planar and cylindrical discharges is calculated as a function of the gas density N, the angular frequency omega , and the diffusion length for the discharge tube Lambda , assuming predominant direct ionisation.