Publication | Closed Access
Effects of two-step annealing on the epitaxial growth of CoSi2 on silicon
20
Citations
11
References
1983
Year
Materials EngineeringMaterials ScienceEpitaxial GrowthEngineeringPhysicsNanoelectronicsApplied PhysicsSemiconductor Device FabricationMolecular Beam EpitaxySilicon On InsulatorMicroelectronics
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