Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2002 · 14 citations · 1 references
EngineeringChemistryAnalytical ChemistryInstrumentationPlasma PhysicsIon ImplantationIonization ChambersIonization ProcessesIonization TechniquesPlasma SourcesIon Source DesignIon Source OptimizationIon Source PhysicsIon SourcesIonization Mechanisms
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