Pulse shape and laser-energy extraction from e-beam-pumped KrF

Abstract

In this paper, detailed comparisons are made between the numerical predictions of a comprehensive KrF kinetics/laser-model computer code and the experimental results from an e-beam-pumped KrF laser. The code and the experimental laser device are described. The inputs to the code are the measured temporally varying e-beam energy and current density, the laser mixture, the optical-cavity output coupling, and the optical gain length. Comparisons include laser output power, laser output pulse shape, and KrF* fluorescence from the laser-cavity sidelight under lasing and nonlasing conditions. Using our numerical model, we have generated a scaling map for the KrF* laser.