Concepedia

Publication | Open Access

Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor

DOIFull Paper Access

21

Citations

41

References

2013

Year

Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock, Nazlim Bagcivan, Ricardo H. Brugnara, Marcel Schäfer, Jan Trieschmann
Surface and Coatings Technology

References

YearCitations

Page 1