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Mechanical and tribological properties of titanium–aluminium–nitride films deposited by reactive close-field unbalanced magnetron sputtering

Materials ScienceAluminium NitrideMagnetic PropertiesTribological CoatingEngineeringMechanical EngineeringSurface ScienceApplied PhysicsTribological PropertiesThin Film Process TechnologyThin FilmsTitanium–aluminium–nitride FilmsThin Film Processing