Recapture of secondary electrons by the target in a DC planar magnetron discharge - Concepedia

Concepedia

Publication | Closed Access

Recapture of secondary electrons by the target in a DC planar magnetron discharge

52

Citations

19

References

2003

Year

Guy Buyle, Veerle De Bosscher, Diederik Depla, Karin Eufinger, J. Haemers, Roger De Gryse

Electrical EngineeringEngineeringPhysicsGlow DischargeApplied PhysicsApplied Plasma PhysicSecondary ElectronsPlasma PhysicsGas Discharge Plasma

References

	Year	Citations

Page 1