Publication | Closed Access
MIRIRS studies of the growth of Si and Si-Ge alloys from molecular precursors
39
Citations
27
References
1993
Year
Materials ScienceMaterials EngineeringEngineeringApplied PhysicsSiliceneMolecular PrecursorsSemiconductor Device FabricationSi-ge AlloysSilicon On InsulatorMirirs StudiesMicrostructure
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