Publication | Closed Access
Plasma-deposited silicon oxide barrier films on polyethersulfone substrates: temperature and thickness effects
59
Citations
16
References
2004
Year
Materials ScienceEngineeringBarrier FilmsPlasma-deposited SiliconSilicon On InsulatorSurface ScienceApplied PhysicsPolyethersulfone SubstratesThin FilmsChemical Vapor DepositionPlasma ProcessingThin Film Processing
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