Concepedia

Publication | Closed Access

Application of Ru-based gate materials for CMOS technology

DOI

37

Citations

6

References

2004

Year

M. T ̆apajna, P. Písec ̆ny, R. Lupták, K. Hus ̆eková, K. Fröhlich, L. Harmatha, Jacob C. Hooker, F. Roozeboom, J. Jergel
Materials Science in Semiconductor Processing

References

YearCitations

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