3D computer simulation of the primary electron orbits in a magnetic multipole plasma source

Abstract

Performance characteristics of the magnetic multipole plasma source depend strongly on the structure of the line-cusp magnetic fields and the behavior of the primary electrons. In order to design and improve the plasma source efficiently, we developed a computer code which can simulate primary electron orbits in the three-dimensional magnetic field generated in the source. Using this code, we compared the orbits of the primary electrons in the arc discharges with and without the mode-flip phenomenon. The result indicates that the trapping of the primary electrons in a local magnetic mirror fields causes the mode flip due to the reduction of the effective anode area. Trapping also degrades the spatial uniformity of the source plasma density, due to local arc discharge. The structure of the magnetic field can be optimized so that the primary electrons fill the center region of the source. The 3D simulation of the electron orbits turned out to be effective and useful in designing a multipole source.