Thermochemical Data on Gas Phase Compounds of Sulfur, Fluorine, Oxygen, and Hydrogen Related to Pyrolysis and Oxidation of Sulfur Hexafluoride

Abstract

Thermochemical data on selected gas phase compounds containing sulfur, fluorine, oxygen, and hydrogen are evaluated. These are of particular relevance to plasma chemistry and SF6 dielectric breakdown. Values of the enthalpies of formation and the entropy are provided at 298 K. Where no experimental data are available, methods for estimation have been developed for deriving the enthalpy of formation. Data are tabulated for 36 substances.