Effect of the substrate temperature on the deposition of hydrogenated amorphous carbon by PACVD at 35 kHz - Concepedia

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Effect of the substrate temperature on the deposition of hydrogenated amorphous carbon by PACVD at 35 kHz

33

Citations

24

References

1999

Year

R. Gago, O. Sánchez, A. Climent‐Font, J. M. Albella, E. Román, J. Räisänen, E. Raühala

Thin Solid Films

Materials EngineeringMaterials ScienceAmorphous CarbonCarbonizationEngineeringSubstrate TemperatureApplied PhysicsHydrogenAmorphous SolidChemical Vapor Deposition

References

	Year	Citations

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