Concepedia

Publication | Closed Access

Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system

DOI

46

Citations

9

References

2008

Year

Shengli Ma, Bin Xu, Guizhi Wu, Yanfeng Wang, Fei Ma, Dayan Ma, Kewei Xu, Tom Bell
Surface and Coatings Technology

References

YearCitations

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