Photosensitive Polyimide/Silica Hybrids

Abstract

Improved performance of polymers, with respect to their mechanical and electrical properties for microelectronic applications, for example, can be obtained by introducing nanometer-size inorganic particles into the polymer matrix. The preparation and properties—particularly the photolithographic ones—of hybrids of a photosensitive polyimide (shown in the Figure) and silica are reported for the first time.