Titanium disulfide films fabricated by plasma CVD - Concepedia

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Titanium disulfide films fabricated by plasma CVD

38

Citations

2

References

1986

Year

Keiichi Kanehori, Yuki Ito, F. Kirino, K. Miyauchi, Toshiji Kudo

Solid State Ionics

Materials ScienceEngineeringApplied PhysicsChemical Vapor DepositionThin FilmsTitanium Disulfide FilmsChemical DepositionPlasma Processing

References

	Year	Citations

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