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Organosilicon/silicon oxide gas barrier structure encapsulated flexible plastic substrate by using plasma-enhanced chemical vapor deposition

Materials ScienceChemical EngineeringEngineeringFlexible ElectronicsSurface ScienceApplied PhysicsPrinted ElectronicsFlexible Plastic SubstrateSurface ModificationChemical Vapor DepositionGas Barrier StructurePlasma ProcessingPolymer Chemistry