In-situ light scattering studies of substrate cleaning and layer nucleation in silicon MBE - Concepedia

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In-situ light scattering studies of substrate cleaning and layer nucleation in silicon MBE

30

Citations

5

References

1987

Year

David J. Robbins, A. J. Pidduck, A. G. Cullis, N. G. Chew, R. W. Hardeman, D. B. Gasson, C. Pickering, A.C. Daw, Matthew Johnson, R. Jones

Journal of Crystal Growth

Materials ScienceWafer Scale ProcessingSilicon MbeEngineeringOptical PropertiesSurface ScienceApplied PhysicsSubstrate CleaningSemiconductor Device FabricationSilicon On InsulatorOptoelectronicsLayer NucleationThin Film ProcessingSilicon Debugging

References

	Year	Citations

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