Concepedia

Publication | Closed Access

A study of the formation of nanometer-scale cavities in helium-implanted 4H-SiC

DOI

30

Citations

19

References

2004

Year

C.H. Zhang, S. E. Donnelly, Vladimir Vishnyakov, J.H. Evans, T. Shibayama, Yuhan Sun
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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