Growth kinetics of concomitant nitride layers in post-discharge conditions: modeling and experiment - Concepedia

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Growth kinetics of concomitant nitride layers in post-discharge conditions: modeling and experiment

30

Citations

8

References

1996

Year

U. Figueroa, J. Oseguera, P.S. Schabes-Retchkiman

Surface and Coatings Technology

Aluminium NitrideElectrical EngineeringEngineeringPost-discharge ConditionsConcomitant Nitride LayersSurface ScienceApplied PhysicsGlow DischargeTransport PhenomenaChemical DepositionGas Discharge PlasmaGrowth KineticsChemical KineticsChemical Vapor Deposition

References

	Year	Citations

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