Effects of Oxygen Partial Pressure and Substrate Temperature on Crystalline Orientation in Y-Ba-Cu-O Films Prepared by Sputtering

Abstract

The dependence of crystalline orientation in Y-Ba-Cu-O films on oxygen partial pressure and substrate temperature has been investigated for films prepared by magnetron sputtering on (100) SrTiO 3 and (100) MgO substrates. The tendencies for preferential orientation were the same on both substrates. At low oxygen pressures, the c -axis was oriented perpendicularly to the film plane. In contrast, a / c -axis oriented films were formed at intermediate oxygen pressures, and the a -axis was oriented at high oxygen pressures. At higher temperatures, c -axis oriented films were formed, even at high oxygen pressures.