Publication | Closed Access
Low-Energy Ion Scattering from the Si(001) Surface
186
Citations
30
References
1982
Year
Materials ScienceSurface CharacterizationEngineeringPhysicsLow-energy IonSurface AnalysisSurface ScienceApplied PhysicsClean SiSiliceneAtomic PhysicsSpecialized TechniqueSilicon On InsulatorMicroelectronicsSurface Reconstruction
The structure of a clean Si(001) surface has been studied by a specialized technique in low-energy ion scattering spectroscopy. It has been found that (1) the surface is dimerized, and (2) the intradimer atomic distance parallel to the surface is 2.4 \ifmmode\pm\else\textpm\fi{} 0.1 \AA{}.
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