Polarization control in flexible interference lithography for nano-patterning of different photonic structures with optimized contrast

Jianfang He, Xiaohui Fang, Yuanhai Lin, Xinping Zhang

Optics Express · 2015 · 14 citations · 14 references

DOIFull text

Open access

Concepts

Abstract

Half-wave plates were introduced into an interference-lithography scheme consisting of three fibers that were arranged into a rectangular triangle. Such a flexible and compact geometry allows convenient tuning of the polarizations of both the UV laser source and each branch arm. This not only enables optimization of the contrast of the produced photonic structures with expected square lattices, but also multiplies the nano-patterning functions of a fixed design of fiber-based interference lithography. The patterns of the photonic structures can be thus tuned simply by rotating a half-wave plate.

References

14