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Determination of layer-thickness fluctuations in Mo/Si multilayers by cross-sectional HR-TEM and X-ray diffraction

DOI

10

Citations

18

References

2003

Year

A. Aschentrup, Wiebke Hachmann, Th. Westerwalbesloh, Y.C. Lim, U. Kleineberg, U. Heinzmann
Applied Physics A

References

YearCitations

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