Determination of layer-thickness fluctuations in Mo/Si multilayers by cross-sectional HR-TEM and X-ray diffraction

A. Aschentrup, Wiebke Hachmann, Th. Westerwalbesloh, Y.C. Lim, U. Kleineberg, U. Heinzmann

Applied Physics A · 2003 · 10 citations · 18 references

Concepts

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