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A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions

Materials ScienceIon ImplantationEngineeringSurface ScienceMechanical EngineeringApplied PhysicsRelief ProcessesSolid MechanicsThin FilmsStress GenerationChemical DepositionIon EmissionMechanics Of MaterialsThin Film ProcessingElectrical Insulation