Properties of <i>p</i>+ microcrystalline films of SiC:H deposited by conventional rf glow discharge

Abstract

Using a conventional rf glow discharge, we have grown microcrystalline p+ SiC:H films having conductivities 2–2×10−3 (Ω cm)−1 and activation energies 0.05–0.1 eV with carbon concentrations 0–6 at. %, respectively. Increasing the carbon content suppresses the microcrystallinity. The choice of substrate is crucial to initiating the immediate onset of microcrystalline growth in thin (∼200–400 Å) films.