The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition - Concepedia

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The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition

DOI Full Paper Access

34

Citations

19

References

2007

Year

Lijian Meng, Jinsong Gao, M.P. dos Santos, Xiaoyi Wang, Tongtong Wang

Thin Solid Films

Materials ScienceIon ImplantationEngineeringOxide ElectronicsApplied PhysicsIon Beam EnergyIon BeamThin FilmsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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