Deposition of hard crystalline Al2O3 coatings by pulsed d.c. PACVD - Concepedia

Concepedia

Publication | Closed Access

Deposition of hard crystalline Al2O3 coatings by pulsed d.c. PACVD

32

Citations

14

References

1999

Year

Ch. Täschner, B. Ljungberg, I. Endler, A. Leonhardt

Surface and Coatings Technology

Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsChemical DepositionPulsed Laser DepositionPulsed D.c. PacvdSurface ProcessingChemical Vapor Deposition

References

	Year	Citations

Page 1