Concepedia

The sputtering of compounds

S. P. Wolsky, E. J. Zdanuk, D. Shooter

Surface Science · 1964 · 18 citations · 11 references

DOI

Concepts

References

11

Structure and Adsorption Characteristics of Clean Surfaces of Germanium and Silicon

R. E. Schlier, H. E. Farnsworth · The Journal of Chemical Physics · 1959 · 882 citations

, , +14

Sputtering Yields at Very Low Bombarding Ion Energies

R. V. Stuart, G. K. Wehner · Journal of Applied Physics · 1962 · 306 citations

, , +12

The penetration of positive ions of low energy into alloys and composition changes produced in them by sputtering

Elizabeth M. J. Gillam · Journal of Physics and Chemistry of Solids · 1959 · 133 citations

, , +15

Atom Ejection Patterns in Single-Crystal Sputtering

G. S. Anderson, G. K. Wehner · Journal of Applied Physics · 1960 · 65 citations

, , +14

Structure and adsorption characteristics of (111) and (11) surfaces of InSb cleaned by ion bombardment and annealing

D. Haneman · Journal of Physics and Chemistry of Solids · 1960 · 62 citations

, , +14