Publication | Closed Access
Ion beam sputter deposition of low loss Al2O3 films for integrated optics
20
Citations
6
References
1988
Year
Materials ScienceOptical MaterialsEngineeringOptical PropertiesApplied PhysicsIntegrated OpticsThin FilmsPulsed Laser DepositionMicroelectronicsChemical DepositionOptoelectronicsChemical Vapor DepositionThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1