Publication | Closed Access
Correlation between the surface characteristics and the duty cycle for the PACVD-derived TiN nanostructured films
22
Citations
14
References
2011
Year
Materials EngineeringMaterials ScienceEngineeringDuty CycleSurface ScienceApplied PhysicsPacvd-derived TinThin FilmsSurface CharacteristicsSurface ProcessingChemical Vapor DepositionThin Film Processing
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